製程環境設備
精密製程環境設備
製程精密溫濕度及水冷控制機(THC)
-高精密氣體溫度控制
-高精度流體溫度控制
-處理風量依需求調整
-流體迴路數量依需求調整
-高精度流體溫度控制
-處理風量依需求調整
-流體迴路數量依需求調整
氣體與液體同時間維持溫度穩定性±0.01℃
- 高精密氣體溫度控制
- 高精度流體溫度控制
- 處理風量依需求調整
- 流體迴路數量依需求調整
最佳相對溼度穩定精度:±0.3%
FEATURES
THC特點
占地面積減少30%↑
減少電力消耗15%↑
使用無臭氧破壞冷媒
符合SEMI-S2認證
PRODUCT ADVANTAGES
產品優勢
01
Advantages
節能率
Energy Saving
45
45
%
02
Advantages
佔地面積減少
Size Cost
50
50
%
PRODUCTS SPECIFICATIONS
產品規格
|
Specifi -cation |
Equipment Type | THC-HS60C5 |
| Supply Air Volume (m3/min) | 60 | |
| Cleanliness |
ISO Class 3 to 5 (ISO 4 for Basic type) |
|
| Air Temperature Stability | ±0.01℃ | |
| Air Temperature Set-point range | 22 ~ 24℃ | |
| Humidity Stability | ±0.3%RH | |
| Humidity Set-point range*1 | -5 ~ +10%RH | |
| Circulating fluid | DI Water | |
| Circulating fluid Flowrate (Liter / min) | ~110 | |
| Circulating Temperature Stability | ±0.01℃ | |
| Liquid Temperature Set-point range | 22 ~ 24℃ | |
| Dimension (mm) | 1,350L x 1,100W x 2,000H | |
| Utility | Ambient condition | 20 ~ 24℃/ RH40 ~ 60% |
| Power Source | AC220V 3P4Wires + PE | |
| Required Process Cooling Water | 0.25~0.6Mpa, 18℃, 1-1/4”Rp | |
| Drain Flow rate (Liter / min) | < 1.0 | |
| DI water flow rate (Liter / min) | < 1.0 | |
| Clean Dry Air Port | 1/2" |
PRODUCT APPLICATIONS
產品應用
搭接設備
Coater / Developer
Exposure tool
客戶與實績
01
半導體前段製造 / IDM /封裝測試
02
光電面板大廠
