精密冷卻水控制機

製程環境設備精密製程環境設備

冷卻水控制機(DCC&CWC)

提供節能且精密溫度控制之循環液體，滿足不同製程之溫度需求。

設備規格	設備型號	CWC-CE10
	外尺寸(mm)	450^Lx400^Wx300^H
	循環流量(L/min)^*1	5~10
	溫度穩定性(℃)^*2	±0.01~0.001*
	操作溫度範圍(℃)^*3	20~30
	致冷方式	致冷晶片模組
	循環液體	去離子水
	桶槽容量(Liter)	2.5
	致冷功率(Watt)	180
	加熱功率(Watt)	300
	最大電力消耗(Watt)	400
	平均電力消耗(Watt)	200
	人機介面	3.5吋全彩觸控面板
泵浦	最大流量(L/min)	40
泵浦	最大揚程(m)	6
廠務需求	電源規格	AC220V,3Ø,Wires+PE
	循環液接口	RP 1/2"
	冷卻水流量(L/min)@18℃	5~10
	冷卻水接口	RP 1/2"
Note 1：若操作超出規定的流量範圍，可能導致性能下降、控制精度受影響，並產生噪音。 Note 2：測試條件：設定溫度：25°C/PCW（水冷系統）溫度：18°C/PCW 流量：10 L/min/環境溫度：25°C Note 3：適用範圍：本產品具備內建循環系統，可依不同環境需求進行調整，無論高溫或低溫皆能保持穩定運作。

Specification	Equipment Type	CWC-CE10
	Dimension(mm)	450^Lx400^Wx300^H
	Circulating fluid (L/min)^*1	5~10
	Temperature Stability(℃)^*2	±0.01~0.001*
	Operating Temperature range(℃)^*3	20~30
	Cooling Method	Thermoelectric Modules
	Circulating fluid	DI Water
	Tank capacity(Liter)	2.5
	Cooling Capacity(Watt)	180
	Heating Capacity(Watt)	300
	Max. Power Consumption(Watt)	400
	Avg. Power Consumption(Watt)	200
	HMI	3.5" Full Color Touch Panel
Pump	Max. Flow rate(L/min)	40
Pump	Max. Pump head(m)	6
Utility	Power Supply	AC220V,3Ø,Wires+PE
	Circulating Port	RP 1/2"
	PCW Flow rate(L/min)@18℃	5~10
	PCW Port	RP 1/2"
Note 1: Operating outside the specified flow rate range can compromise performance, control accuracy, and generate noise. Note 2: Conditions:Set temperature: 25°C/PCW temperature: 18°C/PCW flow rate: 10 L/min/Ambient temperature: 25°C Note 3: Adaptable Range: Our products can be adjusted to suit various environments, from high to low temperatures, with a built-in circulation system.

Specification	Equipment Type	DCC10W-P	DCC05W-P
	Dimensions (mm)	450Wx700Lx850H
	Circulating fluid (L/min)^*1	30	15
	Temperature stability (℃)^*2	±0.1~0.05
	Operating Temperature range (℃)	15~40 ℃
	Cooling Method	Direct Cooling System
	Circulating fluid*3	DI Water/Fluorinated fluids
	Cooling capacity (kW)^*1	10kW	5kW
	Circulating fluid temperature (℃)	Facility water temperature+5℃
	Tank capacity (Liter)	10
	Max. operating current (A)	15 (Variable Pump)
	HMI	7" Full Color Touch Panel
Pump	Max. Pump head(m)	7
	Max. Flow rate(L/min)	40
Utility	Power	AC208~220V,3Ø,Wires+PE
	Circulating fluid Port	Rc 3/4"
	Facility water temperature (℃)	10~35
	Facility water required flow rate(LPM)^*1	35	20
	Facility water Port	Rc 3/4"
	Ambient condition	Temperature 15~35℃ / Humidity 30~70%RH
	Note1: Conditions:DIWater 30 lpm/Facility water: 35 lpm@18°C/Ambient temperature: 25°C
	Note2: Adaptable to changing load conditions.
	Note3: For using liquids other than DI water, please contact CHD.

Specification	Equipment Type	DCC10W	DCC05W
	Dimensions (mm)	450Wx700Lx850H
	Circulating fluid (L/min)^*1	≦ 30	≦ 15
	Temperature stability (℃)^*2	±0.1~0.05
	Operating Temperature range (℃)	15~40 ℃
	Cooling Method	Direct Cooling System
	Circulating fluid*3	DI Water/Fluorinated fluids*
	Cooling capacity (kW)^*1	10kW	5kW
	Circulating fluid temperature (℃)^*1	Facility water temperature+5℃
	Tank capacity (Liter)	10
	Max. operating current (A)	<3A (Without Pump)
	HMI	7" Full Color Touch Panel
Pump	Max. Pump head(m)	N/A
	Max. Flow rate(L/min)	N/A
Utility	Power	AC208~220V,3Ø,Wires+PE
	Circulating fluid Port	Rc 3/4"
	Facility water temperature (℃)	10~35
	Facility water required flow rate(LPM)	35	20
	Facility water Port	Rc 3/4"
	Ambient condition	Temperature 15~35℃ / Humidity 30~70%RH
	Note1: Depending on customer situation, such as flow rate, temperature, and pressure.
	Note2: Adaptable to changing load conditions.
	Note3: For using liquids other than DI water, please contact CHD.