Patent:
TW-M357317
CN-ZL 2012 2 0075732.3
Ability |
Providing accurate temperature and humidity control solution for LCD、Wafer、Packaging industry. Ensuring the good yield and efficiency in aligner, development, and coating process. |
Characteristics |
Cleanliness:ISO Class 1 |
Temperature accuracy range: ±0.1℃ ~ ±0.01℃ |
Humidity accuracy range:±2%RH ~ ±1%RH |
Built-in temp.& humidity curve data |
Machine alarm |
Remote-monitor |
Auto protection |
Applications |
•Industry : Semiconductor / Flat Panel Display (FPD) Precision Machining / Precision Measuring / Academic Research |
•Supply Chain : Panel Manufacturing / Color filter Packaging testing / Package / Wafer Manufacturing |
•Application : RGB Photoresist Coating / Aligner Development / Lens lapping / Laser Machining / Geometric dimensions measuring |