Patent：
TW-M357317
CN-ZL 2012 2 0075732.3
| Ability |
| Prevent aligner lens hazing in order to extend the durable life of lens Prolong exposure LAMP time Raising product yield rate Protect the inner component of machine from the chemical pollutant |
| Characteristics |
| Cleanliness：ISO Class 4 |
| Temperature accuracy range：±0.5℃ ~±0.3℃ |
| Humidity accuracy range ：±5%RH ~ ±3%RH |
| AMC removal：>80% in Main AMC |
| Built-in temp.& humidity record |
| Machine alarm |
| Remote-monitor |
| Auto protection |
| Applications |
| Industry : Semiconductor / Flat Panel Display (FPD) |
| Supply Chain : Panel Manufacturing / Color filter / WaferPackage |
| Application : RGB Photoresist Coating / Aligner / Development / Prevent Lens Hazing |
