Provide the cleanliness control for the production environment.
Ability |
Provide the cleanliness control for the production environment, using single-split type in order to prevent the production equipment are affected by the vibration. |
Characteristics |
Cleanliness : ISO Class 1 |
Alarm feedback : Alarm Information network about AFU system and processing equipment |
Applications |
Cleanliness requirement for the production environment |
•Manufacture : Semiconductor / LCD / IC Packaging / Traditional industry |
•Cleanliness environment : Pharmaceutical factory / Biotechnology / Hospital / Operation room / Hospital wards |